06508122 is referenced by 59 patents.

A microelectromechanical system (MEMS) for measuring angular rate of a carrier includes an angular rate sensor unit, microelectronic circuitry, and signal processing to obtain highly accurate, sensitive, stable angular rate measurements of the carrier under dynamic environments. Wherein, the angular rate sensor unit receives dither driver signals, capacitive pickoff excitation signals, and displacement restoring signals to output angle rate signals in response to the motion of the carrier and dither motion signals; the central circuitry receives the angle rate signals in response to the motion of the carrier and dither motion signals to output angular rate signals and digital low frequency inertial element displacement signals; a digital signal processing system analyzes digital low frequency inertial element displacement signals to feed back the dither drive signals to the angular rate sensor unit.

Title
Microelectromechanical system for measuring angular rate
Application Number
9/662438
Publication Number
6508122 (B1)
Application Date
September 15, 2000
Publication Date
January 21, 2003
Inventor
Ching Fang Lin
Simi Valley
CA, US
Hiram McCall
Simi Valley
CA, US
Agent
David and Raymond Patent Group
US
Agent
Raymond Y Chan
US
Assignee
American GNC Corporation
CA, US
IPC
G01P 9/04
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